STAR-6 PVD Coating System
The STAR-6 is the highest-capacity PVD coating system of the STAR series. The key features include fast cycle time, easy operation with a 5-axis planetary carousel, and nine (9) sets of Φ6" circular cathodic arc evaporators. STAR6 is ideal for customers looking for high throughput or larger parts up to 43”.
Vacuum Chamber
- Construction: 304 stainless steel with chamber shutter
- Cooling: Double walled chamber with water cooling
- Chamber Size: Φ 850 × 1150 mm (Φ 33.5” x 45.3”)
- Effective Plasma Zone: Φ 580 × 750 mm (Φ 22.8” x 29.5”)
Cathodic Arc Evaporation Source
- Cathode: 9 sets of Φ6" circular cathodic arc evaporator/ Auto arc triggering
- Power Supply: 9 sets of 200A pulse DC power supply (Huttinger German made or equivalent)
- Water Cooling: 1 spare set of cathode cooling base
Pump System
- Primary Mechanical Pump: 65 m3/h (Leybold German made or equivalent)
- Root Pump: 500 m3/h (Leybold German made or equivalent)
- Turbomolecular Pump: 2200 l/s (Leybold German made or equivalent)
- Vacuum gate valve: Vacuum valves (Leybold German made or equivalent)
- Dust Filter: Filter for vacuum route (MANN German made or equivalent)
Vacuum Measure & Component
- Piezo Gauge: 1 set
- Pirani Gauge: 2 set
- Penning Gauge: 1 set
- Baratron Gauge: 1 set
Tools Per Batch
2040+
Based on ø 1/4” x 3” OAL
Coating Types
10+
Runs Per Day
4
Gas Flow Control
- Mass Flow Controller Ar & N: 1 set
- Mass Flow Controller C, H: 1 set
- Reactive Gas Filter & Valve : SS filters and valves
Heater
- Heater Specification: 24kW 3 sets (chamber sides and door)
- Controller: 1 set of PID temperature control / 2 sets of thermocouple
Software Function
- User-friendly interface with touch screen control
- Password protected coating parameter input
- Automatic and manual process control
- Coating log and record & Self-monitoring
- Uninterruptible power supply (UPS) for Controller
- SIKA water flow sensor
- Remote diagnostics
- Safety interlock protect function
Cycle Time
- Batch Cycle Time: 5 Hours
Equipment Footprint
- Footprint: L 2500 x W 1850 x H 2200 mm (L 98.5” x W 72.8” x H 86.6”)
- Recommended Operating Footprint: L 5000 × W 5000 mm (16’ x 16’)
Loading Carousel
- Carousel: 2 sets of carousel & loading wagon
- Carousel Configuration: 5-axis planetary carousel
- Loading Capacity – Weight: 500 kg
- Loading Capacity - Space: Φ580 × 750 mm
- Plates – 17 slots (with 4-in-1 holder): ø 1/8" - ø 1/4" (or ø 3 - ø 6 mm)
- Plates – 25 slots: ø 5/16" - ø 1/2" (or ø 8 - ø 12 mm)
- Plates – 17 slots: ø 3/4" - ø 1" (or ø 20 - ø 25 mm)
Carousel Loading Capacity
- Regular Round Cutting Tool: ø 1/2” x 3” OAL - 750 pcs
- Small Round Cutting Tool:ø 1/4” x 3” OAL - 2,040 pcs
- Long Round Cutting Tool: Up to 10” OAL - 170 pcs
