LEAN 710 PVD Metalizing System
Introducing the LEAN 710 – a groundbreaking innovation in thin-film deposition technology for PVD metalizing. Its field-convertibility sets the LEAN 710 apart, allowing seamless transitions between thermal evaporation and magnetron sputtering, or vice versa. With the LEAN 710, you unlock the power of multiple technologies within a single platform, providing unmatched flexibility and versatility.
Applications:
- Automotive lighting & trim
- LED lighting
- Chrome finishing
- Decorative packaging
- Solar energy
- Plastic hardware
- Appliance handles & knobs
Features:
- Rapid cycle in 4 minutes
- Multiple matched pumping package options
- Large plenum cryotrap, options for cryochiller
- Up to 60kW per cathode for sputtering
- PLC-controlled process, open-architecture with password protection for customer-controlled program modifications
- Data-logging
- Fixturing and process development support
- Ethernet-ready for remote support
Vacuum Chamber
- Chamber Size: Φ 825 × 1575 mm (Φ 32.5” x 62.0”)
- Effective Plasma Zone: Φ 710 × 1220 mm (Φ 28.0” x 48.0”)
Evaporation Source
- Thermal Evaporation
- Single or dual cathode sputtering process available
Pump System
- Mechanical Pumping Package (Leybold, or equivalent)
- Root Pump: 15 hp motor (Leybold, or equivalent)
- Diffusion Pump: Leybold, or equivalent
Vacuum Measure & Component
- MKS capacitance manometer: 1 set
- INFICON wide-range cold cathode/Pirani Gauge: 1 set
- INFICON Pirani Gauge: 2 sets
Coating Cycle
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A complete cycle may include the following operations in less than 4 minutes:
- Pumping
- Pre-treat glow
- Base coat HMDSO
- Metal deposition
- Top coat HMDSO
- Post-treat etching
- Venting
