STAR-ICS800R PVD Coating System
Vacuum Chamber
- Construction: 304 stainless steel with chamber shutter
- Cooling: Double walled chamber with water cooling
- Chamber Size: Φ 800 × 1050 mm (Φ 31.5” x 41.3”)
- Effective Plasma Zone: Φ 500 × 600 mm (Φ 19.7” x 23.6”)
Cathodic Arc Evaporation Source
- Cathode: 4 sets of 611 x 191mm rectangular cathodic arc evaporator/ Auto arc triggering
- Power Supply: 4 sets of pulse DC power supply (Huttinger German made)
- Water Cooling
Pump System
- Two-stage Rotary Pump: 80 m3/h (Edwards)
- Root Pump: 500 m3/h (Edwards)
- Turbomolecular Pump: 2200 l/s (Edwards)
- Vacuum gate valve: Vacuum valves (VAT)
- Dust Filter: Filter for vacuum route
Vacuum Measure & Component
- Pirani Gauge: 2 set
- Penning Gauge: 1 set
- Baratron Gauge: 1 set
Tools Per Batch
1920+
Based on ø 1/4” x 3” OAL
Coating Types
10+
Runs Per Day
4
Gas Flow Control
- Mass Flow Controller: 4 sets
- Reactive Gas Filter & Valve : SS filters and valves
Heater
- Heater Specification: 10kW 4 sets (Swiss made)
- Controller: 4 sets of thermocouple
Software Function
- User-friendly interface with touch screen control
- Password protected coating parameter input
- Automatic and manual process control
- Coating log and record & Self-monitoring
- Uninterruptible power supply (UPS) for Controller
- Remote diagnostics
- Safety interlock protect function
Cycle Time
- Batch Cycle Time: 5 Hours
Equipment Footprint
- Footprint: L 3226 x W 2502 x H 2113 mm (L 127.0” x W 98.5” x H 83.2”)
- Recommended Operating Footprint: L 5000 × W 5000 mm (16’ x 16’)
Loading Carousel
- Carousel: 2 sets of carousel & loading wagon
- Carousel Configuration: 8-axis planetary carousel
- Loading Capacity - Space: Φ500 × 600 mm
- Plates – 8 slots: ø 1/8" - ø 1/4" (or ø 4 - ø 6 mm)
- Plates – 15 slots: ø 5/16" - ø 5/8" (or ø 8 - ø 16 mm)
Carousel Loading Capacity
- Regular Round Cutting Tool: ø 1/2” x 3” OAL - 600 pcs
- Small Round Cutting Tool:ø 1/4” x 3” OAL - 1,920 pcs
